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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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0 to 700 kPa (0 to 100 PSI) High Pressure, Temperature Compensated & Calibrated, Silicon Pressure Sensors
The MPX2700A series device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output -- directly proportional to the applied pressure. The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The sensor is laser trimmed for precise span and offset calibration and temperature compensation. Features * Unique Silicon Shear Stress Strain Gauge * 1.0% Linearity * Full Scale Span Calibrated to 40 mV * Easy to Use Chip Carrier Package * Basic Element, Single Ported Devices Available Application Examples * Pump/Motor Controllers * Pneumatic Control * Tire Pressure Gauges * Robotics * Medical Diagnostics * Pressure Switching * Hydraulics
BASIC CHIP CARRIER ELEMENT CASE 344-11 Style 1
MPX2700A SERIES
X-ducerTM SILICON PRESSURE SENSORS
DIFFERENTIAL PORT OPTION CASE 350-05 Style 1
Pin Number
1 Ground 2 + Vout Value 2800 5000 - 40 to +125 - 40 to +125 3 VS 4 - Vout Unit kPa kPa C C
MAXIMUM RATINGS
Rating (8) (P1 > P2) Overpressure Burst Pressure(8) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pburst Tstg TA
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the X-ducer is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1). Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY
X-ducer SENSING ELEMENT
2 4
Vout+ Vout-
1
X-ducer is a trademark of Motorola, Inc.
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
(c)Motorola Sensor Device Data Motorola, Inc. 1996
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MPX2700A SERIES
OPERATING CHARACTERISTICS (VCC = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) (0 to 700 kPa) Temperature Hysteresis(5) (- 40C to +125C) Temperature Effect on Full Scale Span(5) Temperature Effect on Offset(5) Input Impedance Output Impedance Response Time(6) (10% to 90%) Offset Stability(5) Symbol POP VS Io VFSS Voff V/P -- -- -- TCVFSS TCVoff Zin Zout tR -- Min 0 -- -- 37.5 -2.0 -- - 1.0 -- -- -1.0 -1.0 1300 1400 -- -- Typ -- 10 6.0 40 -- 0.057 -- 0.1 0.5 -- -- -- -- 1.0 0.5 Max 700 16 -- 42.5 2.0 -- 1.0 -- -- 1.0 1.0 4000 3000 -- -- Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV ms %VFSS
MECHANICAL CHARACTERISTICS
Characteristic Weight (Basic Element Case 344) Warm-Up Cavity Volume Volumetric Displacement Common Mode Line Pressure(7) Symbol -- -- -- -- -- Min -- -- -- -- -- Typ 2.0 15 -- -- -- Max -- -- 0.01 0.001 690 Unit Grams Sec Cubic In Cubic In kPa
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * Offset Stability: Output deviation, after 1000 temperature cycles, - 40 to 125C, and 1.5 million pressure cycles, with zero differential pressure applied. * TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Common mode pressures beyond specified may result in leakage at the case-to-lead interface. 8. Exposure beyond these limits may cause permanent damage or degradation to the device.
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Motorola Sensor Device Data
MPX2700A SERIES
LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit or (2) a least squares best line fit (see Figure 3). While a least squares fit gives the "best case" linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
LEAST SQUARES FIT RELATIVE VOLTAGE OUTPUT EXAGGERATED PERFORMANCE CURVE LEAST SQUARE DEVIATION
STRAIGHT LINE DEVIATION
END POINT STRAIGHT LINE FIT
OFFSET 0 50 PRESSURE (% FULLSCALE) 100
Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX2700A series at 25C. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on Full-Scale Span and Offset are very small and are shown under Operating Characteristics.
50 40 OUTPUT (mV) 30 20 MIN 10 0 -5 LEAD FRAME OFFSET VS = 10 V TA = 25C P1 > P2 MAX
SPAN RANGE (TYP)
WIRE BOND
PSI kPa
20 140
40 280
60 420
80 560
100 700
Figure 3. Output versus Pressure Differential
Figure 4. Cross-Section of Differential Pressure Sensor Die in Its Basic Package (Not to Scale)
Figure 4 shows the cross section of the Motorola MPX pressure sensor die in the chip carrier package. A silicone gel isolates the die surface and wire bonds from harsh environments, while allowing the pressure signal to be transmitted to the silicon diaphragm. MPX2700A series pressure sensor operating characteristics and internal reli-
ability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
Motorola Sensor Device Data
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
SILICONE DIE COAT DIE P1 P2 THERMOPLASTIC CASE
TYP
STAINLESS STEEL METAL COVER
RTV DIE BOND
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MPX2700A SERIES
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing silicone gel which protects the die from harsh media. The Motorola MPX presPart Number MPX2700A MPX2700AP MPX2700ASX 344-11 350-05 371C-03 Case Type
sure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below:
Pressure (P1) Side Identifier Stainless Steel Cap Side with Port Attached Side with Port Attached
ORDERING INFORMATION MPX2700A series pressure sensors are available in various absolute configurations. Devices are available in the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure connections.
MPX Series Device Type Basic Element Ported Elements Absolute Stovepipe Axial Options Case Type Case 344-11 Case 350-05 Case 371C-03 Order Number MPX2700A MPX2700AP MPX2700ASX Device Marking MPX2700A MPX2700AP MPX2700A
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Motorola Sensor Device Data
MPX2700A SERIES
PACKAGE DIMENSIONS
C R M B -A- N
PIN 1
1 2 3 4
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- DOES NOT INCLUDE MOLDED FLASH RING. MOLDED FLASH RING NOT TO EXCEED 16.00 (0.630). DIM A B C D F G J L M N R INCHES MIN MAX 0.595 0.620 0.514 0.534 0.200 0.220 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _ NOM 0.475 0.495 0.430 0.450 MILLIMETERS MIN MAX 15.11 15.75 13.06 13.56 5.08 5.59 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _ NOM 12.07 12.57 10.92 11.43
L
-T- J
SEATING PLANE
G F
4 PL
D
0.136 (0.005)
M
TA
M
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344-11 ISSUE R
BASIC ELEMENT (A, D)
SEATING PLANE
-T- R H N
PORT #1 POSITIVE PRESSURE
-A- U L
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC
-Q-
B
12 34
PIN 1
K S F G D 4 PL 0.13 (0.005)
-P- 0.25 (0.010) J C
M
TQ
S
DIM A B C D F G H J K L N P Q R S U
M
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 350-05 ISSUE J
PRESSURE SIDE PORTED (AP, GP)
Motorola Sensor Device Data
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MPX2700A SERIES
PACKAGE DIMENSIONS -- CONTINUED
-T- C E A U -Q-
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.016 0.020 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.41 0.51 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.92
V
N R
PORT #1 POSITIVE PRESSURE
B
-P- 0.25 (0.010)
M
PIN 1
TQ
M
4
3
2
1
S K
DIM A B C D E F G J K N P Q R S U V
J
F D 4 PL 0.13 (0.005)
G
M
TP
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND V (+) OUT V SUPPLY V (-) OUT
CASE 371C-03 ISSUE C
PRESSURE SIDE PORTED (ASX, GSX)
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters can and do vary in different applications. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. How to reach us: USA/EUROPE: Motorola Literature Distribution; P.O. Box 20912; Phoenix, Arizona 85036. 1-800-441-2447 MFAX: RMFAX0@email.sps.mot.com - TOUCHTONE (602) 244-6609 INTERNET: http://Design-NET.com
JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, Toshikatsu Otsuki, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 03-3521-8315 HONG KONG: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298
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*MPX2700A/D*
Motorola Sensor Device Data MPX2700A/D

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